7.9E-15 to 12.4E-15 Grams
||Luke Johnson et al., Characterization of vaccinia virus particles using microscale silicon cantilever resonators and atomic force microscopy, Sensors and Actuators B: Chemical, Volume 115, Issue 1, 23 May 2006, Pages 189-197 doi:10.1016/j.snb.2005.08.047 p.195 right column top paragraph
||Abstract: "The resonant frequency spectra of the cantilevers were measured using a microscope scanning laser Doppler vibrometer before and after the addition of virus particles, and scanning electron micrographs were taken in order to quantify the number of virus
particles attached to the cantilevers."
||7.9 to 12.4 fg. P.195 right column top paragraph: "The single virus particle mass calculated using 21µm×9µm and 6µm×4µm cantilevers was 12.4±1.3 and 7.9±4.6 fg, respectively, which are consistent with the expected range of 5–10 fg. With such high sensitivity, cantilever beams such as those used in this study are very promising for use in biochemical sensors capable of detecting airborne virus particles."